Abstract
Devices that are used in the aerospace industry must operate in extreme conditions, so it is important to understand how the properties of materials change under the influence of radiation and low temperatures. Anodic aluminum oxide, due to its mechanical and dielectric properties, is widely used in electronic devices with a high degree of integration. Radiation exposure can lead to degradation of the electrophysical parameters of dielectric films and can also change their chemical composition. The methods for studying the effect of radiation exposure on the dielectric properties of films are shown in this article. The research has been carried out and the results of the influence of α-particles on the dielectric properties of a porous film of anodic aluminum oxide during the influence of low temperature are presented.
Highlights
Porous anodic alumina is a material with a unique structure
Anodic aluminum oxide films can be used as dielectric bases for integrated circuits, matrices for the synthesis of nanoscale materials, membranes and active elements of sensors
The study of the effect of radiation on the dielectric properties of anodic aluminum oxide films was carried out using a capacitor structure in which the aluminum base was used as the lower plate and sprayed contact pad as the upper plate. 1 mm thick aluminum was used as a material for the test structures
Summary
Aluminum oxide film is an ordered structure of hexagonal cells with a pore in the center of the cell. Anodic aluminum oxide films can be used as dielectric bases for integrated circuits, matrices for the synthesis of nanoscale materials, membranes and active elements of sensors. Ionizing radiation, which causes significant changes in the properties of materials, include x-rays and γ-radiation, fluxes of electrons, protons, neutrons, as well as the nuclei of atoms of chemical elements. The flow of electrons (β-radiation), when exposed to a substance, is able to penetrate to a shallow depth. In this case, electrons lose energy for the excitation and ionization of atoms, for elastic collisions with atoms, for bremsstrahlung radiation, which affects deeper layers of the material. Electrons lose energy for the excitation and ionization of atoms, for elastic collisions with atoms, for bremsstrahlung radiation, which affects deeper layers of the material. α-particles are nuclei of helium atoms
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