Abstract

The influence of organic phases on the properties of green tapes and sintered substrates made of aluminum nitride was studied. Substrates were processed by tape casting, thermocompression, burning out of organic components and sintering. Cracking during drying and delamination during thermocompression are sensitive to the inorganic to organic and binder to plasticizer ratios. The porosity of green tapes and the apparent density decrease when the organic content increases. The apparent density increases whereas the porosity and the tensile strength of green tapes decrease when the plasticizer content increases.

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