Abstract
The nitrogen-doped hydrogenated diamond like coatings (a-C:H:N) with 0–3 at.% nitrogen content were deposited onto 316 L steel substrate by PECVD. The x-ray photoelectron spectroscope, Raman spectroscopy, and Fourier transformation infrared spectroscopy are used to study their bonding structure evolution during annealing. Effect of annealing on their hardness and residual stress is also evaluated by nano indenter and film stress instrument. It shows that the sp3 fraction in a-C:H:N coatings contains lot of Nsp3 and reaches the maximum around 0.12 at.% N content. The a-C:H:N coating with 2.95 at.% N can keep high sp3 fraction and high hardness 12.4 GPa even after annealed at 590 °C.
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