Abstract
Structural and optical properties of MgxZn1-xO (x=0.23) thin films grown by radio frequency (R.F.) magnetron sputtering and annealed with different temperature (from 100°C to 400°C) are reported. The films were single-phase, highly c-axis oriented and wurtzite structure. The transmission spectra, recorded in the visible range, reveal a high transmission coefficient (about 95 %) in the obtained films. Besides, when the annealing temperature is 100°C, the crystalline grains are smooth, compact and uniformly distributed. As the annealing temperature increases from 100°C to 400°C, the crystalline grains get larger, but the annealing temperature does not influence optical transmittance obviously.
Published Version
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