Abstract

Thermodynamic analyses incorporating the contribution of lattice constraint from the substrates were carried out to understand the relationship between input In mole ratio and solid composition of stress-free InGaN, InGaN on GaN and InGaN on InN during metalorganic vapour phase epitaxy. The calculated results suggest that a compositionally unstable region is found at the InN-rich region for InGaN on GaN at high temperatures, while that for InGaN on InN can be seen at the GaN-rich region due to the lattice constraint from the substrate. These results imply that incorporating the contribution of lattice constraint is indispensable to predict the thermodynamic properties of such materials.

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