Abstract
The influence of ion–atom arrival ratio on composition, micro-structure and optical properties of ZrNx films prepared by ion beam assisted deposition was studied by using XPS, XRD, and spectroscopic ellipsometry. The stoichiometric ZrN is prepared at ion–atom arrival ratio of 1.5. For ZrNx films deposited at ion–atom arrival ratio of 2.4 and 5.0, a strong (220) texture is formed in the ZrNx film. The refractive index of ZrNx films increased with the increase of ion–atom arrival ratio; whereas, a continuous decrease of the extinction coefficient was noticed.
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