Abstract

Here, the electrical performance of an amorphous Indium Gallium Zinc Oxide (a-IGZO) Thin Film Transistor (TFT) is examined using the Silvaco Atlas tool. The effects of several factors such as drain current (Id), Sub threshold Swing (SS), IonIoff, threshold voltage (Vth), on voltage (Von) are closely examined. When SiO2 was replaced by high-k HfO2, TFT shows low SS of 0.17 V/decade, high IonIoff ratio of ∼1018 and Von of 0.13 V. Effect of channel length is also analysed for high-k Al2O3 dielectric. This analysis might be useful for researchers to realize future TFT related applications.

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