Influence of growth temperature on MoS2 synthesis by chemical vapor deposition

Abstract

Monolayer and few-layer molybdenum disulfide (MoS2) has attracted tremendous attention owing to the unique structure as well as excellent semiconducting and optical properties. However, the synthesis of large area few-layer MoS2 with high crystalline quality and highly uniform remains a challenge. In this work, the synthesis of MoS2 nanosheets via chemical vapor deposition (CVD) method was investigated by controlling the heating temperature of MoO3 powder. The results show that the growth temperature is a crucial parameter to adjusting morphology and crystalline quality of MoS2 nanosheets. At a low growth temperature below 730 °C, MoS2 nanosheets tend to lateral growth and be triangular in shape. While at a growth temperature over 730 °C, MoS2 nanosheets turn to longitudinal growth and the morphology translates into hexagonal shapes. Large-size monolayer triangular MoS2 nanosheets with high homogeneity and high crystalline quality were synthesized at the temperature of 700 °C. Moreover, the higher growth temperature is favorable for increasing crystalline quality of MoS2.