Abstract
Experimental results on harmonic distortions in 13.56 MHz RF Argon glow discharge using different grounded electrodes areas and electrodes spacing are presented. The experiment is carried out at four pressure values. RF power values used are between 20 and 90 watts. The results indicate significant increase in distortions at two specific values of the cone angle enclosing the two electrodes within its geometrical volume. The computation of the cone head angle gave the symmetry discharge or asymmetry as well as when the angle is small the condition is near symmetry discharge associated with decrease in the nonlinearity.
Highlights
Low pressure, capacitively coupled radio discharge are widely used for material processing. capacitively coupled plasmas (CCPs) have been used for several decade for etching and deposition on the film [1, 2, 3, 4]
There are two type of CCPs RF discharge, symmetric discharge include two identical electrodes [5,6], whilst in asymmetric discharge systems the plasma formed between two unequal electrodes area, later create a dc voltage appears as a result for the different in electron and ion mobility, this attributes to the different mass between them
Kawata et al.,[12] calculated the magnitude of second harmonic generated by plasma nonlinearity and they showed that it strongly dependent on the impedance plasma associated with the matching network circuit
Summary
Capacitively coupled radio discharge are widely used for material processing. capacitively coupled plasmas (CCPs) have been used for several decade for etching and deposition on the film [1, 2, 3, 4]. Gottscho et al, [8] showed that the discharge structure in CCP system contains the layers sandwiches (sheathplasma-sheath) usually formed with frequency well known 13.56 MHz in Argon plasma and the two sheaths at both of the two electrodes discharge can be described as a pure capacitive properties, in addition to this study gave very important results about the effects in the CCP discharge when using a different electrodes area ratio. The influence of the discharge parameters RF power, Argon gas pressure, inter-electrodes distance, the diameter (area) of grounded electrode, results current waveform distortion, DC-bias, second harmonic components are studied.
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