Influence of discharge parameters on the resolution of depth profiling by pulsed glow discharge atomic emission spectrometry

Abstract

Investigations have been performed using microsecond pulsed glow discharge atomic emission spectrometry (GD-AES) to determine the effect of the glow discharge parameters, including applied pulse voltage, pulse width, pulse frequency and gas pressure, on the resolution of depth profiling. The results indicate that a concave crater profile is obtained for low voltage, whereas the curvature is convex for high voltage. The criteria of a flat crater bottom and good depth resolution are fulfilled only with a limited range of voltages at each operating pressure. The results also imply that the pulse frequency and pulse width have little effect on the resolution of depth profiling; thus a wide dynamic range of layers from several nanometers to tens of micrometers can be analyzed by increasing or decreasing the pulse frequency and width. Under the optimized parameters, a thin coating of Cu (50 nm) on steel, an electroplated steel and a computer hard-disk with multiple thin layers were analyzed.