Abstract

AbstractSummary: Coplanar discharge arrangements consist of one or several pairs of parallel electrodes that are embedded in a dielectric close to a surface. The discharge occurs on the surface of the dielectric in between the electrodes. The influence of electrode distance, thickness, and the type of dielectric on ozone yields has been investigated. The working gas was dry air and oxygen at atmospheric pressure. The power‐voltage characteristic and its effect on ozone concentration have been studied for different devices. The kinetic curves of ozone formation show a distinct maximum in ozone concentration if air is used as feed gas. The value of this maximum depends on the configuration. The ozone concentration is about four times higher in oxygen than in air. The electric characteristics change, when different dielectrics are used. Photographs of the discharge activity on the dielectric surface taken were compared with the corresponding energy density and ozone production. The production was compared with those in other dielectric barrier discharge arrangements as well.Sketch of a coplanar discharge arrangement.magnified imageSketch of a coplanar discharge arrangement.

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