Abstract
The authors have studied the influence of deposition rate on the formation of growth twins in sputter-deposited 330 austenitic stainless steel thin films. Transmission electron microscopy shows that the volume fraction of twinned grains increases with increasing deposition rate, whereas the average columnar grain size and twin spacing stay approximately unchanged. These experimental results agree qualitatively with their analytical model that predicts deposition rate dependent formation of growth twins. The film hardness increases monotonically with increasing volume fraction of twinned grains.
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