Influence of coil geometry on the induction heating process in crystal growth systems

Abstract

Different shapes and orientations of the RF-coil turns in oxide Czochralski crystal growth systems are considered and corresponding results of electromagnetic field and volumetric heat generation have been computed using a finite element method. For the calculations, the eddy current in the induction coil (i.e. the self-inductance effect) has been taken into account. The calculation results show the importance of cross section shape, geometry and position of the RF-coil turns with respect to the crucible and afterheater on the heat generation distribution in a Czochralski growth system.