Abstract
In a helicon discharge excited by a flat inductive antenna, situated at the discharge chamber end, distributions of plasma parameters have been measured by a thermo-emissive probe. The aim of the work was to define an influence producing by the bias potential of the surface being processed on plasma parameters in discharge chambers with either the dielectric or with conducting side walls. It was found that in the dielectric chamber application of a positive voltage and taking electron current to the surface under treatment causes increasing the plasma potential because the opposite sine current can not flow to the insulating wall. In the metal chamber increase of positive voltage on the surface leads to the discharge instability and break off for considerable taking electrons away from the discharge volume.
Published Version
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