Influence of binding layer on the reflective performance of a Au film in vacuum ultraviolet wavelength region

Abstract

We investigate the influence of the binding layer on the reflectance of a Au film in vacuum ultraviolet (VUV) wavelength region theoretically and experimentally. The reflectance of Au films on quartz glass substrates with an approximately 2 nm binding layer of Ti, Cr, and Ir are estimated and fabricated. Their reflectance in the 115-140 nm wavelength region are measured continuously by the reflectometer located in the National Synchroton Radiation Laboratory. The testing results show that the addition of the binding layer indeed greatly enhances the interfacial adhesion of the Au layer to the quartz glass substrate, but it also exerts a considerably adverse impact on the reflectance of the Au layer in VUV wavelength region. In near normal incidence, the reflectance of the Au layer with a 2 nm thick binding layer is less than 20%, approximately 5% lower than those without the binding layer. The material used for the binding layer has little impact on the reflectance if this layer is thin enough.