Abstract
This work presents an investigation of the effects of post-process annealing on the morphologyof mixed copper and titanium oxides and on their electrical and hydrogen sensing properties. (CuTi)Oxthin films were deposited by magnetron sputtering on amorphous silica and ceramic substrates withinterdigitated electrodes. In addition, post-process thermal treatment was applied at the temperaturesof 200C and 250C.The transformation of the thin film structure during the thermal oxidation process was studied byX-ray diffraction, while the morphology of the thin films was determined using an optical profilometer.Current-voltage and thermoelectric characteristics were measured to determine electrical properties,from which the resistance and conduction type were determined. The post-treatment (CuTi)Ox thinfilms exhibited hole-type conduction and, additionally, strongly responded to hydrogen atmosphere.Keywords: electronics, hydrogen gas sensors, mixed copper and titanium oxides, thin films, magnetronsputtering
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