Gas sensing properties of mixtures of copper and titanium oxides thin films

Abstract

The subject of the current studies were mixtures of copper and titanium oxide thin films,with various elemental compositions, deposited by magnetron sputtering and annealed in the postprocess.The effect of elemental composition and annealing temperature on the morphology of thinfilms was determined using scanning electron microscope images. The crystal structure and chemicalcomposition of copper‒titanium oxide (CuTi)Ox mixtures were investigated by X-ray diffraction.Hydrogen gas sensing experiments were performed for hydrogen with concentrations ranging from 100to 1,000 ppm. The resistance of the prepared (CuTi)Ox mixtures increased during hydrogen exposure,demonstrating the applicability of these oxides in hydrogen sensing. In addition, better sensor responseswere obtained for the mixtures in comparison to single copper oxides or titanium oxides. Mixturesof copper oxides and titanium oxides may be promising materials for hydrogen sensor applications.Keywords: mixtures of copper and titanium oxides, hydrogen gas sensors, mixed copper and titaniumoxides, thin films, magnetron sputtering