Influence of AlGaN deep level defects on AlGaN/GaN 2-DEG carrier confinement

Abstract

We have used low energy electron-excited nanoscale luminescence spectroscopy (LEEN) to detect the defects in each layer of AlGaN/GaN HEMT device structures and to correlate their effect on two-dimensional electron gas (2-DEG) confinement. We investigated AlGaN/GaN heterostructures with different electrical properties using incident electron beam energies of 0.5 to 15 keV to probe electronic state transitions within each of the heterostructure layers. AlGaN heterostructures of 25 nm thickness and nominal 30% Al concentration grown on GaN buffer layers on sapphire substrates by plasma-assisted molecular beam epitaxy exhibited a range of polarization-induced electron densities and room temperature mobilities. In general, the spectra exhibit AlGaN band edge emission at /spl sim/3.8 eV or /spl sim/4.0 eV, GaN band edge emission at /spl sim/3.4 eV, yellow luminescence (YL) features at 2.18 eV and 2.34 eV, and a large emission in the infrared (<1.6 eV) from the GaN cap layer used to passivate the AlGaN outer surface. These heterostructures also show high strain in the 2 nm-thick GaN layer with evidence for a Franz-Keldysh red shift due to piezoelectric charging. The LEEN depth profiles reveal differences between the structures with and without 2-DEG confinement and highlight the importance of AlGaN defects in the near 2-DEG region.