Abstract
CrMoSiCN/Ag coatings with various Ag contents were deposited using unbalanced closed-field magnetron sputtering by adjusting Ag target current. There were (Cr, Mo)N solid solution, Ag nano-crystals and amorphous Si-C-N in coatings. As Ag target current increased, the morphological characteristics were changed from refined grains to agglomerate Ag particles on surfaces, and then the surface roughness of coatings increased, while the coating hardness first raised and then declined, while the contact angles of water on coatings decreased. When Ag target current was 0.4 A, the coating presented the lowest friction coefficient and lowest wear rate. The friction-reduced mechanism of CrMoSiCN/Ag coatings with high Ag content was due to the tribo-layer of Ag, MoO3 and Ag2MoO4 in air and hydroxide in water.
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