Abstract
A series of ZrN-Ag nano-composite films were deposited using the RF magnetron sputtering system. The microstructure, mechanical properties and tribological performances were investigated. The results showed that ZrN-Ag films were composed of face-centered cubic (fcc)-ZrN and face-centered cubic (fcc)-Ag. With the increase of Ag content, the hardness of ZrN-Ag composite film increased rapidly and then decreased rapidly. The maximum hardness value was 22.8 GPa at 6.1at.% Ag. At room temperature, the coefficient of friction (Cof.) of ZrN-Ag films were lower than the ZrN film. During 25-500°C, the Cof. of ZrN-Ag films at 29.16 at.% Ag were lower than ZrN film, while the wear rate were higher than the ZrN film. In summary, the addition of Ag improved the hardness, and decreased the Cof. of the ZrN-Ag during 25-500°C.
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