Abstract
In order to evaluate the influence of ion chemistry on ion-induced interfacial chemistry and thin film adhesion, 30 nm Ni films on polyester (PET) and polyimide (PI) substrates were implanted with various doses (1-10 x 1016 Al/cm2) of 50 keV 27Al+. The ion-induced interfacial chemistry and adhesion were then examined using X-ray photoelectron spectroscopy (XPS) and scratch testing, respectively. The implantation induced extensive interfacial mixing in both types of specimens. In addition, the implanted Al reacted with oxygen in the polymer substrates to form interfacial Al2O3 and Al-O-C layers in the Ni/PET and Ni/PI specimens, respectively. Despite the ion-induced interfacial mixing and compound formation, the scratch testing indicated that no significant adhesion enhancement was produced by the 27 Al+ ion mixing. The absence of adhesion enhancement was attributed to the absence of complete chemical bonding between the Ni films and the polymer substrates. Criteria for the selection of an effective reactive ion for adhesion enhancement in a given film/substrate system are discussed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
