Abstract

X-Ray photoelectron spectra were measured when the excited X-rays were impinged on a Ag surface with a grazing angle. The spectral backgrounds owing to the electron inelastic scattering in solids were lower when the incident X-rays were totally reflected than when the X-rays were not totally reflected. We developed a new method to estimate the electron inelastic mean free path (IMFP). The IMFP was estimated to be 1.00 nm, which was one half of the usually accepted length, for 1630 eV kinetic energy electrons in Ag from the reduction factor of the backgrounds of the total reflection X-ray photoelectron spectra.

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