Abstract
Results of angle-resolved ion fraction measurements and an electron spectroscopy study of low keV Ne and Ne+ collisions with a Si surface are presented. Similar charge fractions for neutral and ionic projectiles are obtained, indicating that ion production occurs as a result of collisions with surface atoms. Production of Ne∗∗ autoionising states is observed and its efficiency as a function of collision energy is determined. The characteristics of autoionising peak line shapes suggest differences in angular distributions of the different Ne∗∗ states. The effect of oxygen adsorption is studied and it is shown that exposure to oxygen results in a strong decrease of autoionising state production. Differences with oxygen adsorption on Mg and Al targets are underlined.
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