Abstract
In this article, an indirectly heated micro-electrothermal actuator is presented. The actuator has a capacitive sensor monolithically integrated to provide in vivo sensing of the actuator’s displacement. The actuator and sensor are fabricated using the PolyMUMPs process. Electrothermal and thermal-mechanical models of the actuator have been developed. Simulated displacement versus input current reasonably agrees with tested results. The integrated capacitive sensor readout is an indicator for the displacement.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
