Abstract
This paper presents several novel CMOS switched-capacitor circuits for high-accuracy on-chip capacitive ratio testing and sensor readout. Using sigma-delta and correlated-double-sampling (CDS) techniques, these circuits provide accurate digitized capacitive ratio readout. Both single-ended and fully-differential circuits are presented. Simulation results show that the resolution can be as small as 10 ppm. A single-ended circuit was implemented and tested. The measured standard deviation is below 0.08 fF when 10 pF capacitors were tested.
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