Abstract
Planar-type thin-film inductor has been fabricated using Co 92Zr 8 soft magnetic thin film with high permeability as conductor. The inductance of the Co 92Zr 8 inductor is about five times more than that of the Cu inductor at frequency 60 MHz. At the same time, the dissipation of thin-film inductor using Co 92Zr 8 is similar with that of the Cu inductor. This result presents a novel method for increasing the inductance of thin-film inductor with simple technical process.
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