Increased critical thickness for high Ge-content strained SiGe-on-Si using selective epitaxial growth

Abstract

The onset of misfit dislocation formation, i.e., the critical thickness for heteroepitaxy, is studied for selective epitaxial growth of high Ge-content, strained SiGe on oxide-patterned Si wafers. Misfit dislocation spacing was analyzed as a function of film thickness using plan-view transmission-electron microscopy. For selective epitaxial growth at 450 °C, the critical thickness for Si0.33Ge0.67 is found to be 8.5 nm. This is a twofold increase compared to the 4.0 nm theoretical equilibrium critical thickness and the 4.5 nm critical thickness measured for growth on bare Si wafers. The misfit dislocation density for selective epitaxial growth is strongly influenced by the shape and orientation of the growth area.