Incline compensation control using an air-spring type active isolated apparatus

Abstract

In order to avoid the deformation of main body supported by air-spring type active isolated apparatus, a pressure feedback was previously introduced for its isolated apparatus. The primal purpose of this feedback was to suppress the deformation of the main body by controlling air-spring force. Furthermore the author recognize that the incline of the main body due to XY stage scanning will be easily compensated by utilizing that the driving mechanism of air-spring with the pressure feedback becomes an astatic system. If the incline of the main body is effectively corrected, the precise scanning of XY stage is expected because the disturbance for the control loop of XY stage is removed. Firstly, this paper briefly shows the principle of the pressure feedback which provides a basis for the incline compensation. Secondly, the feed-forward scheme for its compensation is clarified. Finally, the experimental results of the incline compensation are shown.