Inclination of a threading dislocation in an epilayer of 4H-SiC

Abstract

Threading dislocations (TDs) are inclined from the [0001] c-axis in 4H-SiC epilayers which are produced by the step-controlled technique. The reason for this inclination is discussed in the framework of isotropic elastic theory of dislocation. The elastic strain energy of a TD in an epilayer is calculated as a function of its orientation, and the minimum energy orientation is used to predict the inclination angle. The results of the calculations are as follows. For a cut-off angle (α) of 4°, a threading edge dislocation (TED) and a threading pure screw dislocation (TpSD) are inclined from the c-axis by 12 and 2°, respectively: Threading near screw dislocations (TnSDs) and threading mixed dislocations (TMDs) are inclined by angles ranging from 8 to 15° from the c-axis, depending on their actual Burgers vectors. Similarly for α of 8°, a TED and a TpSD are inclined from the c-axis by 21 and 4°, respectively: TnSDs and TMDs are inclined from the c-axis by angles ranging from 7 to 17°. These predictions are in good agreement with experiment.