Abstract
Molecular beam epitaxy (MBE) is an ideal technique for in situ studies of the growth mechanisms of thin films and other low-dimensional structures. There is an ultra-high-vacuum (UHV) environment, so it is compatible with many surface-science techniques, and the incident fluxes can be very accurately controlled. In this paper, I will summarize the application of reflection high-energy electron diffraction (RHEED) and scanning tunneling microscopy (STM) to the homoepitaxial growth of GaAs (0 0 1) films and the growth of InAs on low-index orientation GaAs substrates. I will emphasize the importance of establishing an interpretation that is consistent with results from both methods and also demonstrate the necessity of combining the experimental approach with theoretical treatments, both simulation and analytical.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Journal of Materials Science: Materials in Electronics
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.