In-Situ Strain Measurement Via X-Ray Diffraction

Abstract

ABSTRACTA high speed x-ray diffraction system has been built around a Curved Position Sensitive Detector. This system has a hot/cold stage in a modified vacuum chamber to allow for control of the ambient gas mix while in-situ x-ray diffraction spectra are acquired. We have used this system to measure the strain in Al/Cr/SiO2 structures after abrupt changes in temperature. The good adhesion afforded by the Cr layer combined with the large difference in the thermal expansion coefficients of the Al (≃25×10−6/°K) and the quartz (≃0.5×10−6/°K) components make this an ideal sample for demonstrating the capabilities of this system. In-situ resistivity measurement provides an independent indication of the changes in the sample.