In situ REM observations of surfactant-mediated epitaxy: growth of Ge on Si(111) surfaces mediated by Bi

Abstract

A study of growth of Ge on Si(111) surfaces mediated by Bi was carried out by reflection electron microscopy and reflection high-energy electron diffraction (REM-RHEED). A study of Bi-adsorbed Si(111) surfaces was also carried out. A “7 × 7” structure was formed by deposition of Bi below 200°C and it transformed into a (√3 × √3)- β structure at 200°C. Dark particles appeared on the surface at 200°C and the formation of the dark particles is the precursor of the formation of the (√3 × √3)- β structure. The (√3 × √3)- β structure transformed into a (√3 × √3)- α structure at 280°C and domain contrast was seen on the (√3 × √3)- α surface terraces. The density of three-dimensional (3D) islands of Ge on the Si(111)-Bi surfaces was higher and their size was smaller than those on the Si(111)(7 × 7) surfaces. Moreover, the critical thickness at which the layer growth of Ge transforms into the island growth on the surfaces with Bi was thinner than that on the bare surfaces. Smoothing of Ge films on the surfaces with Bi was observed.