Abstract
Focused Electron Beam Induced Deposition is a consolidated technique for the growth ofthree-dimensional (3D) nanostructures. However, this single-step nanofabricationmethod requires further efforts to optimize simultaneously dimensional andcompositional properties, in particular for deposits with a high aspect ratio. Morespecifically, ferromagnetic 3D nanowires (NWs) with diameters in the sub-50 nm regimeand high metallic contents up to 95 at. % attract great interest to improve the finalperformance of magnetic nanodevices such as magnetic tips for scanning probemicroscopy. In this work, we report on real-time monitoring during chemical purificationand structural crystallization processes of ultra-narrow 3D Fe NWs (<50 nm in diameterachieved) by post-growth in situ annealing in a transmission electron microscope. NWheating up to 700 oC in very high vacuum reveals the local increase of the metallic contentalong the entire NW length concomitant with the growth of large Fe single crystals frominitially amorphous compounds. A metallic purity of 95 at. % is observed in severalregions, dramatically boosting the initial Fe content of 40 at. %. The real-time in situtracking of 3D nanostructures during thermal annealing is a key element to design andoptimize novel purification processes for the fabrication of customized components to beintegrated in spintronic, logic and sensing devices.
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