In-situ qualification and physics-based process design for aerosol jet printing via spatially correlated light scattering measurements

Abstract

Aerosol jet printing is a contactless, digital, and additive technique broadly used for manufacturing flexible, hybrid, and conformal electronics. However, both intra-batch and batch-to-batch variability have hindered widespread industry adoption and scaling to production volumes. Recently, light scattering measurements have emerged as a tool to measure aerosol volume fraction – a key parameter determining deposition rate – and have proven an effective feedback source for closed-loop control on timescales ranging from tens of minutes to hours. While this is a promising capability to mitigate long-term process drift, it lacks the temporal resolution to validate print quality for complex and precise electronic circuits. Here, real-time process monitoring with <1 s resolution is demonstrated for in-situ qualification of aerosol jet printing. To begin, the correlation between light scattering and aerosol deposition is validated at 500 ms time intervals, allowing deposition rate to be mapped to positional coordinates and providing a new data stream to drive quality control assessments. This allows optical scattering to be connected to electrical properties including line and sheet resistance, resulting in predictions nominally within 10% of measured values for sets of printed devices. Finally, the ability to spatially correlate print defects during fabrication is demonstrated as a foundation for a print repair framework, successfully repairing prints with randomly induced defects to achieve resistance within 5% of a control set.