In-situ observation of reversible 90°-domain switching in Pb(Zr, Ti)O3 films for microcantilever structure

Abstract

The field-induced strain of microcantilever structured Pb(Zr0.44Ti0.56)O3 (PZT) films on Si substrate was observed by a microbeam X-ray diffraction with a two-dimensional detector. The observed field-induced strain strongly depended on the thickness of the substrate. The experimentally estimated longitudinal piezoelectric constants (d 33) for PZT films on 5 and 400 μm thick Si substrates were in good agreement with the theoretical value taking into account the clamping effect from the substrates. These results demonstrate that the microcantilever structure virtually eliminates the clamping effect of the substrates for microelectromechanical system applications.