Abstract
Supercritical fluid chemical deposition is a technique for depositing films and particles in a supercritical medium. In this article, Pt thin films were grown from the supercritical CO2 that dissolves Pt(hfac)2 and H2, and the temperature dependence was studied using in situ ellipsometry. The temperature needed to form a continuous film was determined from the change of ellipsometric parameters. The determined temperature, about 70°C, was lower than the reported values.
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