In situ nanoindentation measurements of arc-evaporated Cr0.49Al0.51N, Al0.66Ti0.34N, and Al0.65Ti0.33Y0.02N films up to 800 °C

Abstract

In this study, the in situ hardness and elastic modulus measurements of arc-evaporated Cr0.49Al0.51N, Al0.66Ti0.34N, and Al0.65Ti0.33Y0.02N films are investigated using a high-temperature nanoindentation tester. It is found that the hardness of Cr0.49Al0.51N initially increases from 30.2 ± 2.3 GPa at room temperature (RT) and reaches a maximum of 33.2 ± 2.4 GPa at 600 °C before decreasing to 27.9 ± 2.1 GPa at 800 °C. However, the results for elastic modulus versus temperature follow a degraded trend, with 405 ± 23 GPa for RT, decreasing to 280 ± 18 GPa at 800 °C. Increases in the hardness and the elastic modulus can be achieved for both Al0.66Ti0.34N and Al0.65Ti0.33Y0.02N films as their temperatures increase. The addition of Y effectively promotes the hardness and the elastic modulus of Al0.66Ti0.34N at RT–300 °C. However, both hardness and elastic modulus change slightly as Y is incorporated at 300–800 °C.