Abstract
The shape and plasma parameters in the afterglow region of a hybrid electron cyclotron resonance-direct current sputtering plasma system were in situ monitored during silver and silver-graphite coatings. The cylindrical symmetry of plasma needed for uniform deposition of semicircular plain bearings was achieved by adjusting the magnetic field and the working pressure. The relative concentration of excited silver atoms was monitored using optical emission spectroscopy. The Ag I (328.068 nm) and Ag I (338.289 nm) lines were found to be sensitive indicators of the sputtered silver atom density. The intensity ratio of the two lines was used for the calculation of the electron temperature distribution on axial and radial direction of the plasma.
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