Abstract

The morphology of the side surface of floating-zone (FZ) single crystal silicon ingots with diameters up to 125 mm grown in the [111] direction on an FZ-20 (Haldor Topse) puller have been studied. The geometry and morphology of ridgelike protrusions (RPs) most frequently observed on the FZ-grown [111]-oriented Si ingots are described for the first time. Analysis of these data allowed RPs corresponding to the octahedral and rhombododecahedral growth habit to be identified among the variety of protrusions. The critical ingot diameters are established, above which the rhombododecahedral RPs appear on dislocation-free crystal ingots. The presence of such RPs can be used for in situ monitoring of the structural state of FZ silicon.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.