Abstract
An advanced multiple molecular beam flux monitoring system under oxygen ambient is developed by using cold cathode discharge induced photo-emission spectroscopy (CCES). In the oxygen ambient, characteristic emission peaks can be detected with Ba, Y and Cu, respectively. However, many O 2 emission peaks are observed over 300 to 600 nm, which interfere with the other metal peaks. In order to determine the actual evaporation rate of metal, the metal peak height is calibrated by substracting the increment of oxygen at the characteristic metal wavelength, which is introduced by the height of individual oxygen peak.
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