Abstract
The modulation amplitude of a phase modulator is calibrated under a fixed incident angle in photoelastic modulation (PEM) ellipsometry. In addition to its modulation amplitude (Δ o), we also calibrated its static phase retardation at 632.8 nm. The ellipsometric parameters of a sample were measured by a multiple harmonic intensity ratio technique and proved that ellipsometric parameters can be obtained under various modulation amplitudes. Since the physical size of PEM is constant, we calibrated the modulation amplitude at multiple wavelengths by setting the Δ o value at 0.383 for 568.2 nm. These calibrations provided enough information for establishing an in situ/real time spectroscopic ellipsometry.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
