Abstract
A high intensity ratio technique is proposed to align all the azimuthal angles of a photoelastic modulation ellipsometric system in a fixed incident angle. This technique is used to determine the azimuthal orientations of the polarizer, the photoelastic modulator and the analyzer to the incident plane. Two pre-designed testing samples and two probing wavelengths for a thin film are introduced to locate the incident plane by the intensity ratio technique in a polarizer-sample-analyzer ellipsometric setup. Then, the azimuth of the photoelastic modulator is directly obtained from two DC radiances separated by 45°. In addition to azimuth deviation, the ellipsometric parameter Ψ can also be determined from the same measurement for determining the incident angle on-line.
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