Abstract
Auger electron spectroscopy (AES) has been used to monitor the composition of Fe and FeTi surfaces, in situ, during Ti, Fe and Ar ion implantation in the presence of CO, C 2H 2, CH 4, N 2 and NH 3 gases at pressures of approximately 10 -6 Torr. Implantation-induced subsurface carburization was observed for Ti + implantation into Fe in CO and C 2H 2 and for Ar + implantation into an FeTi alloy in CO. In these cases, Ti carbide-like bonding of carbon at the surface preceded the subsurface carburization. Carburization was not observed when CH 4 gas was present during Ti implantation of Fe nor was it observed when CO gas was present during Fe self-implantation. Subsurface nitridation, similar to but not exactly analogous to the carburization, occurred during Ti + implantation of Fe with NH 3 gas present. Nitridation did not occur with N 2 gas present even though some nitrogen was adsorbed. The influences of surface chemical reactions are considered, along with other chemical and physical arguments, in proposing an interpretation of these results.
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