Abstract
Using high-resolution IR spectroscopy, we have compared the impurity compositions of monosilane (SiH4) fractions enriched in impurities in the process of cryofiltration and low-temperature distillation of monosilanes derived from silicon tetrafluoride (SiF4) and trichlorosilane (SiCl3H). The results demonstrate that the more volatile impurities present in both monosilanes are methane (CH4) and carbon dioxide (CO2), whereas the impurities specific to the fluoride-derived monosilane are SiF4, SiF3H, and SiF2H2. The less volatile impurities common to both monosilanes are ethane (C2H6), disiloxane (Si2H6O), and disilane (Si2H6); the impurities specific to the fluoride-derived monosilane are tetrafluoroethylene (C2F4) and monofluorosilane (SiFH3); and those specific to the chloride-derived monosilane are hydrogen chloride (HCl) and the chlorosilanes SiClH3, SiCl2H2, and SiCl3H.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
