Abstract
This paper presents the design and experimental implementation of an inversion-based feedforward controller to achieve accurate tracking and fast scanning for an atomic force microscopy (AFM). The proposed controller reduces the tracking error by inverting the vibration dynamics and the hysteresis of the piezoelectric tube scanner (PTS). The hysteresis is compensated by directly constructing an inverse Prandtl-Ishlinskii model, while the vibration dynamics is suppressed by a zero magnitude error tracking controller. A comparison of the experimental images using the proposed controller and a dc-gain open-loop controller is given. The experimental results demonstrate the effectiveness of the proposed controller.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
