Abstract

This article presents the design of a model predictive control (MPC) scheme for fast tracking and accurate scanning of an atomic force microscope (AFM). The design of this controller is based on an identified model of the AFM piezoelectric tube (PZT) scanner. Total development of the AFM imaging and scanning speed has been illustrated through this paper by proper design and implementation of the MPC controller. Experimental results show that the MPC can increase the scanning speed significantly in contrast with the existing PI controller.

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