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Abstract
We optimized the silicon master structure with the dielectric material as the recording material of the thermal recording. We confirmed that a 48-nm-long pit was able to be recorded with a laser of 405 nm wavelength. As a result of that, we could make a 250 gigabyte (GB) data capacity master with a conventional laser beam recorder (LBR). 75 and 100 GB discs with a photopolymer cover film made by the same method were able to be read with a solid immersion lens (SIL)-equipped tester. The 75 and 100 GB disc jitter values were 6 and 10%, respectively. We also confirmed that a 37-nm-long pit could be formed with the SIL-equipped tester as the recording machine of the thermal recording.
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