Abstract
N-octadecyltrichlorosilane [OTS, CH3(CH2)17SiCl3] self-assembled monolayer (SAM) coatings were deposited on Si micromolds by dip-coating. Chemical composition, surface roughness, friction coefficient, thermal stability and surface energy of coatings were investigated. OTS coated silicon (Si) micromolds were used to fabricate PMMA microfluidic devices by hot-embossed process. All OTS coatings were thermally stable up to 180 °C, which is higher than hot-embossing temperature of PMMA. OTS coated micromolds had low friction coefficient, adhesion and superior molding efficiency, which improved lifetime of a uncoated Si micromold from 3 to 27 times.
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