Improvement of microwave feeding on a large bore ECRIS with permanent magnets by using coaxial semi-dipole antenna

Abstract

We are constructing a tandem type electron cyclotron resonance (ECR) ion source (ECRIS). The first stage of this ECRIS has a large-bore with cylindrically comb-shaped permanent magnets. 2.45GHz and 11-13GHz microwaves can be supplied individually and simultaneously to the plasma chamber. For 2.45GHz, a coaxial semi-dipole antenna is used to feed the microwaves. In previous experiments, there were two problems encountered when running the 2.45GHz microwaves. High incident power was necessary to keep ECR discharge at low operating pressure because of high reflected microwave power. The surface of a support insulator between the inner and the outer electrodes of coaxial semi-dipole antenna was easily metalized by sputtering of the metal wall inside the chamber. The purpose of this study was to solve these problems. Performing several simulation experiments supports the hypothesis that the position of the support insulator is significant for microwave power efficiency. The end result was the ability to sustain ECR discharges at extremely low incident microwave power, several tens of watts, by optimized matching of the position and shape of the insulator.