Abstract
We have studied the improvement of vertically-stacked-structureJosephson junctions, employing both the interface-treated junction techniqueand flatYBa2Cu3O7-δ(YBCO) films usingvicinal SrTiO3 (STO) substrates.The obtained film exhibited root-mean-square roughnessof 2.3 nm, which was smallerthan that of the films on normal substrates.We fabricated two chips in order to examine the reproducibility. We measuredsevenjunctions on one chip.These junctionsshowed typical magnetic field modulation of the critical current density(Jc) of 83% at4.2 K.The averaged Jcand the averaged normalized resistance(RnA) were5.0×103 A cm-2with a 1σspread of 4.0% and3.1×10-7 Ω cm2with a 1σspread of 6.4%, respectively.Thus junctions of small excess current with small spread were obtained.To examine the reproducibility of the junctions, we compared thesejunctions with those on the other chip,where the average Jc were 3.7×103 A cm -2.The results showed the improvement of the reproducibilityby flat YBCO films using vicinal STO substrates.
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